10/14/2010	8:52:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2010	8:52:52 AM	Recipe started at 8:52 AM
10/14/2010	8:52:52 AM	Helium valve closed
10/14/2010	8:52:52 AM	H2 valve closed
10/14/2010	8:52:52 AM	BCl3 valve closed
10/14/2010	8:52:52 AM	PH3 valve closed
10/14/2010	8:52:52 AM	SiCl4 pre valve closed
10/14/2010	8:52:52 AM	SiCl4 post valve closed
10/14/2010	8:52:52 AM	Main Vac valve closed
10/14/2010	8:52:52 AM	Bubbler valve closed
10/14/2010	8:52:52 AM	Bypass valve opened
10/14/2010	8:52:52 AM	Helium MFC set to  0.000000
10/14/2010	8:52:52 AM	H2 MFC set to  0.000000
10/14/2010	8:52:52 AM	BCl3 MFC set to  0.000000
10/14/2010	8:52:52 AM	PHl3 MFC set to  0.000000
10/14/2010	8:52:52 AM	SiCl4 MFC set to  0.000000
10/14/2010	8:52:52 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	8:52:52 AM	Tube furnace set to 0
10/14/2010	8:53:42 AM	Helium valve closed
10/14/2010	8:53:42 AM	H2 valve closed
10/14/2010	8:53:42 AM	BCl3 valve closed
10/14/2010	8:53:42 AM	PH3 valve closed
10/14/2010	8:53:42 AM	SiCl4 pre valve closed
10/14/2010	8:53:42 AM	SiCl4 post valve closed
10/14/2010	8:53:42 AM	Bubbler valve closed
10/14/2010	8:53:42 AM	Main Vac valve opened
10/14/2010	8:53:42 AM	Bypass valve opened
10/14/2010	8:53:42 AM	Helium MFC set to  0.000000
10/14/2010	8:53:42 AM	H2 MFC set to  0.000000
10/14/2010	8:53:42 AM	BCl3 MFC set to  0.000000
10/14/2010	8:53:42 AM	PHl3 MFC set to  0.000000
10/14/2010	8:53:42 AM	SiCl4 MFC set to  0.000000
10/14/2010	8:53:42 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	8:53:43 AM	Tube furnace set to 0
10/14/2010	8:53:43 AM	Run finished at 8:53 AM
10/14/2010	8:53:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2010	9:47:14 AM	Helium valve opened
10/14/2010	9:47:16 AM	Helium MFC set to  100.000000
10/14/2010	10:21:51 AM	Helium valve closed
10/14/2010	10:21:53 AM	Helium MFC set to  0.000000
10/14/2010	10:23:32 AM	Recipe started at 10:23 AM
10/14/2010	10:23:32 AM	Helium valve closed
10/14/2010	10:23:32 AM	BCl3 valve closed
10/14/2010	10:23:32 AM	PH3 valve closed
10/14/2010	10:23:32 AM	SiCl4 pre valve closed
10/14/2010	10:23:32 AM	SiCl4 post valve closed
10/14/2010	10:23:32 AM	Main Vac valve closed
10/14/2010	10:23:32 AM	Bypass valve closed
10/14/2010	10:23:32 AM	Bubbler valve closed
10/14/2010	10:23:32 AM	H2 valve opened
10/14/2010	10:23:32 AM	Helium MFC set to  0.000000
10/14/2010	10:23:32 AM	H2 MFC set to  500.000000
10/14/2010	10:23:32 AM	BCl3 MFC set to  0.000000
10/14/2010	10:23:32 AM	PHl3 MFC set to  0.000000
10/14/2010	10:23:32 AM	SiCl4 MFC set to  0.000000
10/14/2010	10:23:32 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	10:23:33 AM	Tube furnace set to 100
10/14/2010	10:24:55 AM	Helium valve closed
10/14/2010	10:24:55 AM	BCl3 valve closed
10/14/2010	10:24:55 AM	PH3 valve closed
10/14/2010	10:24:55 AM	SiCl4 pre valve closed
10/14/2010	10:24:55 AM	SiCl4 post valve closed
10/14/2010	10:24:55 AM	Main Vac valve closed
10/14/2010	10:24:55 AM	Bypass valve closed
10/14/2010	10:24:55 AM	H2 valve opened
10/14/2010	10:24:55 AM	Bubbler valve opened
10/14/2010	10:24:55 AM	Helium MFC set to  0.000000
10/14/2010	10:24:55 AM	H2 MFC set to  500.000000
10/14/2010	10:24:55 AM	BCl3 MFC set to  0.000000
10/14/2010	10:24:55 AM	PHl3 MFC set to  0.000000
10/14/2010	10:24:55 AM	SiCl4 MFC set to  0.000000
10/14/2010	10:24:55 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	10:24:55 AM	Tube furnace set to 1000
10/14/2010	10:44:55 AM	Helium valve closed
10/14/2010	10:44:55 AM	PH3 valve closed
10/14/2010	10:44:55 AM	Main Vac valve closed
10/14/2010	10:44:55 AM	Bypass valve closed
10/14/2010	10:44:55 AM	H2 valve opened
10/14/2010	10:44:55 AM	BCl3 valve opened
10/14/2010	10:44:55 AM	SiCl4 pre valve opened
10/14/2010	10:44:55 AM	SiCl4 post valve opened
10/14/2010	10:44:55 AM	Bubbler valve opened
10/14/2010	10:44:55 AM	Helium MFC set to  0.000000
10/14/2010	10:44:55 AM	H2 MFC set to  500.000000
10/14/2010	10:44:55 AM	BCl3 MFC set to  10.000000
10/14/2010	10:44:55 AM	PHl3 MFC set to  0.000000
10/14/2010	10:44:55 AM	SiCl4 MFC set to  50.000000
10/14/2010	10:44:55 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	10:44:55 AM	Tube furnace set to 1000
10/14/2010	10:56:55 AM	H2 valve closed
10/14/2010	10:56:55 AM	BCl3 valve closed
10/14/2010	10:56:55 AM	PH3 valve closed
10/14/2010	10:56:55 AM	SiCl4 pre valve closed
10/14/2010	10:56:55 AM	SiCl4 post valve closed
10/14/2010	10:56:55 AM	Main Vac valve closed
10/14/2010	10:56:55 AM	Bypass valve closed
10/14/2010	10:56:55 AM	Helium valve opened
10/14/2010	10:56:55 AM	Bubbler valve opened
10/14/2010	10:56:55 AM	Helium MFC set to  500.000000
10/14/2010	10:56:55 AM	H2 MFC set to  0.000000
10/14/2010	10:56:55 AM	BCl3 MFC set to  0.000000
10/14/2010	10:56:55 AM	PHl3 MFC set to  0.000000
10/14/2010	10:56:55 AM	SiCl4 MFC set to  0.000000
10/14/2010	10:56:55 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	10:56:55 AM	Tube furnace set to 0
10/14/2010	11:16:55 AM	Helium valve closed
10/14/2010	11:16:55 AM	H2 valve closed
10/14/2010	11:16:55 AM	BCl3 valve closed
10/14/2010	11:16:55 AM	PH3 valve closed
10/14/2010	11:16:55 AM	SiCl4 pre valve closed
10/14/2010	11:16:55 AM	SiCl4 post valve closed
10/14/2010	11:16:55 AM	Main Vac valve closed
10/14/2010	11:16:55 AM	Bypass valve closed
10/14/2010	11:16:55 AM	Bubbler valve closed
10/14/2010	11:16:55 AM	Helium MFC set to  0.000000
10/14/2010	11:16:55 AM	H2 MFC set to  0.000000
10/14/2010	11:16:55 AM	BCl3 MFC set to  0.000000
10/14/2010	11:16:55 AM	PHl3 MFC set to  0.000000
10/14/2010	11:16:55 AM	SiCl4 MFC set to  0.000000
10/14/2010	11:16:55 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	11:16:55 AM	Tube furnace set to 0
10/14/2010	11:16:56 AM	Run finished at 11:16 AM
10/14/2010	11:45:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2010	11:45:22 AM	Recipe started at 11:45 AM
10/14/2010	11:45:23 AM	Helium valve closed
10/14/2010	11:45:23 AM	H2 valve closed
10/14/2010	11:45:23 AM	BCl3 valve closed
10/14/2010	11:45:23 AM	PH3 valve closed
10/14/2010	11:45:23 AM	SiCl4 pre valve closed
10/14/2010	11:45:23 AM	SiCl4 post valve closed
10/14/2010	11:45:23 AM	Main Vac valve closed
10/14/2010	11:45:23 AM	Bubbler valve closed
10/14/2010	11:45:23 AM	Bypass valve opened
10/14/2010	11:45:23 AM	Helium MFC set to  0.000000
10/14/2010	11:45:23 AM	H2 MFC set to  0.000000
10/14/2010	11:45:23 AM	BCl3 MFC set to  0.000000
10/14/2010	11:45:23 AM	PHl3 MFC set to  0.000000
10/14/2010	11:45:23 AM	SiCl4 MFC set to  0.000000
10/14/2010	11:45:23 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	11:45:23 AM	Tube furnace set to 0
10/14/2010	11:46:11 AM	Helium valve closed
10/14/2010	11:46:11 AM	H2 valve closed
10/14/2010	11:46:11 AM	BCl3 valve closed
10/14/2010	11:46:11 AM	PH3 valve closed
10/14/2010	11:46:11 AM	SiCl4 pre valve closed
10/14/2010	11:46:11 AM	SiCl4 post valve closed
10/14/2010	11:46:11 AM	Bubbler valve closed
10/14/2010	11:46:11 AM	Main Vac valve opened
10/14/2010	11:46:11 AM	Bypass valve opened
10/14/2010	11:46:11 AM	Helium MFC set to  0.000000
10/14/2010	11:46:11 AM	H2 MFC set to  0.000000
10/14/2010	11:46:11 AM	BCl3 MFC set to  0.000000
10/14/2010	11:46:11 AM	PHl3 MFC set to  0.000000
10/14/2010	11:46:11 AM	SiCl4 MFC set to  0.000000
10/14/2010	11:46:11 AM	Bypass solenoid MFC set to  0.000000
10/14/2010	11:46:11 AM	Tube furnace set to 0
10/14/2010	11:46:11 AM	Run finished at 11:46 AM
10/14/2010	11:46:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2010	12:48:57 PM	Recipe started at 12:48 PM
10/14/2010	12:48:57 PM	Helium valve closed
10/14/2010	12:48:57 PM	BCl3 valve closed
10/14/2010	12:48:57 PM	PH3 valve closed
10/14/2010	12:48:57 PM	SiCl4 pre valve closed
10/14/2010	12:48:57 PM	SiCl4 post valve closed
10/14/2010	12:48:57 PM	Main Vac valve closed
10/14/2010	12:48:57 PM	Bypass valve closed
10/14/2010	12:48:57 PM	Bubbler valve closed
10/14/2010	12:48:57 PM	H2 valve opened
10/14/2010	12:48:57 PM	Helium MFC set to  0.000000
10/14/2010	12:48:57 PM	H2 MFC set to  500.000000
10/14/2010	12:48:57 PM	BCl3 MFC set to  0.000000
10/14/2010	12:48:57 PM	PHl3 MFC set to  0.000000
10/14/2010	12:48:57 PM	SiCl4 MFC set to  0.000000
10/14/2010	12:48:57 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	12:48:57 PM	Tube furnace set to 100
10/14/2010	12:50:15 PM	Helium valve closed
10/14/2010	12:50:15 PM	BCl3 valve closed
10/14/2010	12:50:15 PM	PH3 valve closed
10/14/2010	12:50:15 PM	SiCl4 pre valve closed
10/14/2010	12:50:15 PM	SiCl4 post valve closed
10/14/2010	12:50:15 PM	Main Vac valve closed
10/14/2010	12:50:15 PM	Bypass valve closed
10/14/2010	12:50:15 PM	H2 valve opened
10/14/2010	12:50:15 PM	Bubbler valve opened
10/14/2010	12:50:15 PM	Helium MFC set to  0.000000
10/14/2010	12:50:15 PM	H2 MFC set to  500.000000
10/14/2010	12:50:15 PM	BCl3 MFC set to  0.000000
10/14/2010	12:50:15 PM	PHl3 MFC set to  0.000000
10/14/2010	12:50:15 PM	SiCl4 MFC set to  0.000000
10/14/2010	12:50:15 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	12:50:15 PM	Tube furnace set to 1000
10/14/2010	1:10:15 PM	Helium valve closed
10/14/2010	1:10:15 PM	PH3 valve closed
10/14/2010	1:10:15 PM	Main Vac valve closed
10/14/2010	1:10:15 PM	Bypass valve closed
10/14/2010	1:10:15 PM	H2 valve opened
10/14/2010	1:10:15 PM	BCl3 valve opened
10/14/2010	1:10:15 PM	SiCl4 pre valve opened
10/14/2010	1:10:15 PM	SiCl4 post valve opened
10/14/2010	1:10:15 PM	Bubbler valve opened
10/14/2010	1:10:15 PM	Helium MFC set to  0.000000
10/14/2010	1:10:15 PM	H2 MFC set to  500.000000
10/14/2010	1:10:15 PM	BCl3 MFC set to  10.000000
10/14/2010	1:10:15 PM	PHl3 MFC set to  0.000000
10/14/2010	1:10:15 PM	SiCl4 MFC set to  50.000000
10/14/2010	1:10:15 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	1:10:15 PM	Tube furnace set to 1000
10/14/2010	1:22:15 PM	H2 valve closed
10/14/2010	1:22:15 PM	BCl3 valve closed
10/14/2010	1:22:15 PM	PH3 valve closed
10/14/2010	1:22:15 PM	SiCl4 pre valve closed
10/14/2010	1:22:15 PM	SiCl4 post valve closed
10/14/2010	1:22:15 PM	Main Vac valve closed
10/14/2010	1:22:15 PM	Bypass valve closed
10/14/2010	1:22:15 PM	Helium valve opened
10/14/2010	1:22:15 PM	Bubbler valve opened
10/14/2010	1:22:15 PM	Helium MFC set to  500.000000
10/14/2010	1:22:15 PM	H2 MFC set to  0.000000
10/14/2010	1:22:15 PM	BCl3 MFC set to  0.000000
10/14/2010	1:22:15 PM	PHl3 MFC set to  0.000000
10/14/2010	1:22:15 PM	SiCl4 MFC set to  0.000000
10/14/2010	1:22:15 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	1:22:15 PM	Tube furnace set to 0
10/14/2010	1:42:15 PM	Helium valve closed
10/14/2010	1:42:15 PM	H2 valve closed
10/14/2010	1:42:15 PM	BCl3 valve closed
10/14/2010	1:42:15 PM	PH3 valve closed
10/14/2010	1:42:15 PM	SiCl4 pre valve closed
10/14/2010	1:42:15 PM	SiCl4 post valve closed
10/14/2010	1:42:15 PM	Main Vac valve closed
10/14/2010	1:42:15 PM	Bypass valve closed
10/14/2010	1:42:15 PM	Bubbler valve closed
10/14/2010	1:42:15 PM	Helium MFC set to  0.000000
10/14/2010	1:42:15 PM	H2 MFC set to  0.000000
10/14/2010	1:42:15 PM	BCl3 MFC set to  0.000000
10/14/2010	1:42:15 PM	PHl3 MFC set to  0.000000
10/14/2010	1:42:15 PM	SiCl4 MFC set to  0.000000
10/14/2010	1:42:15 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	1:42:15 PM	Tube furnace set to 0
10/14/2010	1:42:16 PM	Run finished at 1:42 PM
10/14/2010	2:39:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2010	2:39:45 PM	Recipe started at 2:39 PM
10/14/2010	2:39:45 PM	Helium valve closed
10/14/2010	2:39:45 PM	H2 valve closed
10/14/2010	2:39:45 PM	BCl3 valve closed
10/14/2010	2:39:45 PM	PH3 valve closed
10/14/2010	2:39:45 PM	SiCl4 pre valve closed
10/14/2010	2:39:45 PM	SiCl4 post valve closed
10/14/2010	2:39:45 PM	Main Vac valve closed
10/14/2010	2:39:45 PM	Bubbler valve closed
10/14/2010	2:39:45 PM	Bypass valve opened
10/14/2010	2:39:45 PM	Helium MFC set to  0.000000
10/14/2010	2:39:45 PM	H2 MFC set to  0.000000
10/14/2010	2:39:45 PM	BCl3 MFC set to  0.000000
10/14/2010	2:39:45 PM	PHl3 MFC set to  0.000000
10/14/2010	2:39:45 PM	SiCl4 MFC set to  0.000000
10/14/2010	2:39:45 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	2:39:45 PM	Tube furnace set to 0
10/14/2010	2:40:33 PM	Helium valve closed
10/14/2010	2:40:33 PM	H2 valve closed
10/14/2010	2:40:33 PM	BCl3 valve closed
10/14/2010	2:40:33 PM	PH3 valve closed
10/14/2010	2:40:33 PM	SiCl4 pre valve closed
10/14/2010	2:40:33 PM	SiCl4 post valve closed
10/14/2010	2:40:33 PM	Bubbler valve closed
10/14/2010	2:40:33 PM	Main Vac valve opened
10/14/2010	2:40:33 PM	Bypass valve opened
10/14/2010	2:40:33 PM	Helium MFC set to  0.000000
10/14/2010	2:40:33 PM	H2 MFC set to  0.000000
10/14/2010	2:40:33 PM	BCl3 MFC set to  0.000000
10/14/2010	2:40:33 PM	PHl3 MFC set to  0.000000
10/14/2010	2:40:33 PM	SiCl4 MFC set to  0.000000
10/14/2010	2:40:33 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	2:40:33 PM	Tube furnace set to 0
10/14/2010	2:40:34 PM	Run finished at 2:40 PM
10/14/2010	2:40:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2010	6:12:15 PM	Recipe started at 6:12 PM
10/14/2010	6:12:15 PM	Helium valve closed
10/14/2010	6:12:15 PM	BCl3 valve closed
10/14/2010	6:12:15 PM	PH3 valve closed
10/14/2010	6:12:15 PM	SiCl4 pre valve closed
10/14/2010	6:12:15 PM	SiCl4 post valve closed
10/14/2010	6:12:15 PM	Main Vac valve closed
10/14/2010	6:12:15 PM	Bypass valve closed
10/14/2010	6:12:15 PM	Bubbler valve closed
10/14/2010	6:12:15 PM	H2 valve opened
10/14/2010	6:12:15 PM	Helium MFC set to  0.000000
10/14/2010	6:12:15 PM	H2 MFC set to  500.000000
10/14/2010	6:12:15 PM	BCl3 MFC set to  0.000000
10/14/2010	6:12:15 PM	PHl3 MFC set to  0.000000
10/14/2010	6:12:15 PM	SiCl4 MFC set to  0.000000
10/14/2010	6:12:15 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	6:12:15 PM	Tube furnace set to 100
10/14/2010	6:13:37 PM	Helium valve closed
10/14/2010	6:13:37 PM	BCl3 valve closed
10/14/2010	6:13:37 PM	PH3 valve closed
10/14/2010	6:13:37 PM	SiCl4 pre valve closed
10/14/2010	6:13:37 PM	SiCl4 post valve closed
10/14/2010	6:13:37 PM	Main Vac valve closed
10/14/2010	6:13:37 PM	Bypass valve closed
10/14/2010	6:13:37 PM	H2 valve opened
10/14/2010	6:13:37 PM	Bubbler valve opened
10/14/2010	6:13:37 PM	Helium MFC set to  0.000000
10/14/2010	6:13:37 PM	H2 MFC set to  500.000000
10/14/2010	6:13:37 PM	BCl3 MFC set to  0.000000
10/14/2010	6:13:37 PM	PHl3 MFC set to  0.000000
10/14/2010	6:13:37 PM	SiCl4 MFC set to  0.000000
10/14/2010	6:13:37 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	6:13:37 PM	Tube furnace set to 1000
10/14/2010	6:33:37 PM	Helium valve closed
10/14/2010	6:33:37 PM	PH3 valve closed
10/14/2010	6:33:37 PM	Main Vac valve closed
10/14/2010	6:33:37 PM	Bypass valve closed
10/14/2010	6:33:37 PM	H2 valve opened
10/14/2010	6:33:37 PM	BCl3 valve opened
10/14/2010	6:33:37 PM	SiCl4 pre valve opened
10/14/2010	6:33:37 PM	SiCl4 post valve opened
10/14/2010	6:33:37 PM	Bubbler valve opened
10/14/2010	6:33:37 PM	Helium MFC set to  0.000000
10/14/2010	6:33:37 PM	H2 MFC set to  500.000000
10/14/2010	6:33:37 PM	BCl3 MFC set to  10.000000
10/14/2010	6:33:37 PM	PHl3 MFC set to  0.000000
10/14/2010	6:33:37 PM	SiCl4 MFC set to  50.000000
10/14/2010	6:33:37 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	6:33:37 PM	Tube furnace set to 1000
10/14/2010	6:45:37 PM	H2 valve closed
10/14/2010	6:45:37 PM	BCl3 valve closed
10/14/2010	6:45:37 PM	PH3 valve closed
10/14/2010	6:45:37 PM	SiCl4 pre valve closed
10/14/2010	6:45:37 PM	SiCl4 post valve closed
10/14/2010	6:45:37 PM	Main Vac valve closed
10/14/2010	6:45:37 PM	Bypass valve closed
10/14/2010	6:45:37 PM	Helium valve opened
10/14/2010	6:45:37 PM	Bubbler valve opened
10/14/2010	6:45:37 PM	Helium MFC set to  500.000000
10/14/2010	6:45:37 PM	H2 MFC set to  0.000000
10/14/2010	6:45:37 PM	BCl3 MFC set to  0.000000
10/14/2010	6:45:37 PM	PHl3 MFC set to  0.000000
10/14/2010	6:45:37 PM	SiCl4 MFC set to  0.000000
10/14/2010	6:45:37 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	6:45:37 PM	Tube furnace set to 0
10/14/2010	7:05:37 PM	Helium valve closed
10/14/2010	7:05:37 PM	H2 valve closed
10/14/2010	7:05:37 PM	BCl3 valve closed
10/14/2010	7:05:37 PM	PH3 valve closed
10/14/2010	7:05:37 PM	SiCl4 pre valve closed
10/14/2010	7:05:37 PM	SiCl4 post valve closed
10/14/2010	7:05:37 PM	Main Vac valve closed
10/14/2010	7:05:37 PM	Bypass valve closed
10/14/2010	7:05:37 PM	Bubbler valve closed
10/14/2010	7:05:37 PM	Helium MFC set to  0.000000
10/14/2010	7:05:37 PM	H2 MFC set to  0.000000
10/14/2010	7:05:37 PM	BCl3 MFC set to  0.000000
10/14/2010	7:05:37 PM	PHl3 MFC set to  0.000000
10/14/2010	7:05:37 PM	SiCl4 MFC set to  0.000000
10/14/2010	7:05:37 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	7:05:37 PM	Tube furnace set to 0
10/14/2010	7:05:38 PM	Run finished at 7:05 PM
10/14/2010	10:20:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2010	10:20:43 PM	Recipe started at 10:20 PM
10/14/2010	10:20:43 PM	Helium valve closed
10/14/2010	10:20:43 PM	H2 valve closed
10/14/2010	10:20:43 PM	BCl3 valve closed
10/14/2010	10:20:43 PM	PH3 valve closed
10/14/2010	10:20:43 PM	SiCl4 pre valve closed
10/14/2010	10:20:43 PM	SiCl4 post valve closed
10/14/2010	10:20:43 PM	Main Vac valve closed
10/14/2010	10:20:43 PM	Bubbler valve closed
10/14/2010	10:20:43 PM	Bypass valve opened
10/14/2010	10:20:43 PM	Helium MFC set to  0.000000
10/14/2010	10:20:43 PM	H2 MFC set to  0.000000
10/14/2010	10:20:43 PM	BCl3 MFC set to  0.000000
10/14/2010	10:20:43 PM	PHl3 MFC set to  0.000000
10/14/2010	10:20:43 PM	SiCl4 MFC set to  0.000000
10/14/2010	10:20:43 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	10:20:43 PM	Tube furnace set to 0
10/14/2010	10:21:33 PM	Helium valve closed
10/14/2010	10:21:33 PM	H2 valve closed
10/14/2010	10:21:33 PM	BCl3 valve closed
10/14/2010	10:21:33 PM	PH3 valve closed
10/14/2010	10:21:33 PM	SiCl4 pre valve closed
10/14/2010	10:21:33 PM	SiCl4 post valve closed
10/14/2010	10:21:33 PM	Bubbler valve closed
10/14/2010	10:21:33 PM	Main Vac valve opened
10/14/2010	10:21:33 PM	Bypass valve opened
10/14/2010	10:21:33 PM	Helium MFC set to  0.000000
10/14/2010	10:21:33 PM	H2 MFC set to  0.000000
10/14/2010	10:21:33 PM	BCl3 MFC set to  0.000000
10/14/2010	10:21:33 PM	PHl3 MFC set to  0.000000
10/14/2010	10:21:33 PM	SiCl4 MFC set to  0.000000
10/14/2010	10:21:33 PM	Bypass solenoid MFC set to  0.000000
10/14/2010	10:21:33 PM	Tube furnace set to 0
10/14/2010	10:21:33 PM	Run finished at 10:21 PM
10/14/2010	10:21:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
